- wafer-stepping lithography
- литография с последовательным шаговым экспонированием всей пластины
English-Russian electronics dictionary .
English-Russian electronics dictionary .
Stepper — A stepper is a device used in the manufacture of integrated circuits (ICs) that is similar in operation to a slide projector or a photographic enlarger. Steppers are an essential part of the complex process, called photolithography, that creates… … Wikipedia